Research Article
Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas
Table 6
An upfront summary of the performance of the printed MEMS switch.
| Actuation scheme | Electrostatic | Actuation voltage | 1.2 V | R (clamp-clamp beam-transmission line), connected by sacrificial layer | 280~400 Ω | R (clamp-clamp beam-transmission line), after removal of sacrificial layer | 2.5~3.0 MΩ | R (transmission line-transmission line), connected by sacrificial layer | 380~450 Ω | R (transmission line-transmission line), after removal of sacrificial layer | 0.40~0.55 MΩ | Current capacity | 0.0001~0.2195 mA | Current on-off ratio | 2195 : 1 | RF insertion loss measured up to 13.5 GHz | 5 dB |
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