Magnetron Sputtered NbN Films with Nb Interlayer on Mild Steel

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<g transform="matrix(.017,-0,0,-.017,.062,12.012)"><path d="M599 650l-18 -160l-30 -2q-2 70 -11 94q-5 16 -26 24t-75 8h-94q-27 0 -33.5 -6.5t-12.5 -32.5l-43 -226h108q52 0 72.5 5t31 18t28.5 52h28l-40 -200h-28q-1 42 -6 56.5t-24.5 21t-70.5 6.5h-108l-32 -177q-13 -65 1 -80.5t88 -22.5l-8 -28h-279l6 28q61 5 77.5 20.5
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International Journal of Corrosion

Magnetron Sputtered NbN Films with Nb Interlayer on Mild Steel

Figure 2