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International Journal of Chemical Engineering
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International Journal of Chemical Engineering
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2012
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Article
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Fig 12
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Research Article
Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility
Figure 12
EPMA photographs of the CaCO
3
adsorbents before and after experiments.
(a)
Before reaction
(b)
During reaction
(c)
After reaction