Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 1

Experimental conditions for the gas-solid reaction.

	Practical system	Experimental conditions
Processing flow rate	400 L/min	1.6 L/min
Inner diameter	45 cm	2.8 cm
Superficial velocity	6 cm/s	6 cm/s
L/D ratio	1.2	1.2
CaCO3 weight	120 kg	31 g
Space velocity (SV)	400 h^−1	6700 h^−1
Adsorbent size	1~2 mm, 2~5 mm	1~2 mm, 2~5 mm
Fixation temperature	150^°C	150^°C