Research Article
Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility
Table 3
Rate constants of the gas-solid reaction of HF and CaCO3.
| | Grain size 1-2 mm | = 6.67 × 10−3 [m3/(mol·min)] | = 1.88 × 10−2 [m3/(mol·min)] | | Grain size 2–5 mm | = 5.37 × 10−3 [m3/(mol·min)] | = 1.17 × 10−2 [m3/(mol·min)] |
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