Research Article
Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data
Figure 2
Squared coefficient of correlation-for-suppressor-concentration () (solid black line) and SIMCA modeling power (solid blue line with diamonds) calculated for entire voltammograms of waveform presented in Figure 1.