Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data

Table 7

and PRESS results for take-one-out cross-validation within the training set for .

Decomposition and regression Technique	# of factors, F (latent variables)		PRESS
CPCR	3	0.9929	1.2435
HPCR	3	0.9929	1.2375
HPLS	3	0.9938	1.0798
MBPLS	3	0.9964	0.6294