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Indian Journal of Materials Science
Table of Contents
Indian Journal of Materials Science
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2013
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Article
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Fig 3
/
Research Article
Structure and Thermal Stability of Copper Nitride Thin Films
Figure 3
The SEM image of
film deposited under various
flow rate 50 sccm; 30 sccm; 10 sccm.
(a)
(b)
(c)