Research Article

Copper-Metalized GaAs pHEMT with Cu/Ge Ohmic Contacts

Figure 6

SEM images of the surface of ohmic contacts which have undergone thermal treatment at 𝑇 = 4 0 0 C under vacuum (a) in a flow of atomic hydrogen (b); magnification 15,000x.
418264.fig.006a
(a)
418264.fig.006b
(b)