Research Article

Wideband Lithium Niobate FBAR Filters

Figure 8

Electrical measurement of the first resonator based on LiNbO3 YXl/163° membrane (a) and the second resonator based on LiNbO3 YXl/36° membrane (b).
459767.fig.008a
(a)
459767.fig.008b
(b)