825629.fig.0011a
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825629.fig.0011b
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825629.fig.0011c
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Figure 11: Electrothermal MEMS OCT reported by Liu et al. (a) SEM and schematic of through vias electrothermal MEMS mirror, (b) 2.6 mm probe 3D model and assembled probe, and (c) 2D and 3D OCT image of microsphere embedded in PDMS. Reprint permission granted by SPIE.