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(a) © 2007 IEEE
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(b) Reprinted with permission from (W. Jung, et al; “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Applied Physics Letters, vol. 88-163901, pp. 1–3, 2006). Copyright (2006), American Institute of Physics
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(c) © 2007 IEEE
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(d) © 2007 IEEE
Figure 3: Electrostatic MEMS OCT from UC-Irvine/UC-Berkeley. (a) SEMs of two MEMS mirrors, (b) Electrical connection through wire bonding, (c) packaged MEMS probe, (d) 3D image of rabbit rectal tissue.