825629.fig.007a
(a)
825629.fig.007b
(b)
825629.fig.007c
(c)
Figure 7: Piezoelectric MEMS OCT reported by Gilchrist et al. (a) SEM of MEMS mirror, (b) 3D MEMS probe design, (c) 2D image of IR card. Reprint permission granted by IOP.