Polishing Sapphire Substrates by 355 nm Ultraviolet Laser

Figure 5

Effect of scanning speed on sapphire polishing (laser energy of 0.036 mJ, pulse repetition rate of 30 kHz, single-scan polishing, Sample A, incident angle of 50° in (b), (c), and (d)).

(a) Effect of laser scanning speed on sapphire surface roughness

(b) Polished surface (10 mm/s)

(c) Polished surface (50 mm/s)

(d) Polished surface (90 mm/s)