Thin Metal Superlens Imaging in Nanolithography

<p>For Ag superlens of thickness ranging from 5 nm to 120 nm sandwiched by two dielectric mediums <span class="nowrap"><svg height="13.823pt" id="M36" style="vertical-align:-5.47418pt" version="1.1" viewbox="-0.0498162 -8.34882 72.4649 13.823" width="72.4649pt" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M387 375C387 402 357 448 257 448C172 448 82 404 82 326C82 289 108 255 156 241V239C85 223 23 181 23 116C23 39 89 -12 182 -12C265 -12 336 31 378 91L361 114C320 73 269 47 216 47C157 47 115 82 115 137C115 191 160 219 218 219C243 219 262 218 272 217L304 259L302 266C295 265 281 264 255 264C195 264 163 294 163 335C163 377 200 416 249 416C293 416 321 389 329 342C331 332 335 329 341 329C355 329 387 352 387 375Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,5.005,3.132)"><path d="M538 684C542 703 539 710 529 710C512 710 455 682 363 674L361 644H396C444 644 448 642 438 594L405 438C373 450 347 451 336 451C288 451 200 416 147 374C69 312 24 207 24 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436C440 442 393 451 366 451C348 451 325 448 313 446C267 437 195 409 147 367C79 308 24 211 24 105C24 37 56 -12 93 -12C121 -12 156 1 199 32C246 66 313 122 349 168H351L286 -147C274 -205 261 -215 210 -224L199 -226L193 -255L438 -243L442 -214L417 -212C364 -208 359 -200 370 -140L433 204C455 324 469 389 481 430ZM391 385C382 336 366 260 358 238C321 178 209 59 143 59C129 59 115 83 115 131C115 207 152 317 220 373C243 392 282 403 314 403C348 403 374 395 391 385Z"></path></g><g transform="matrix(.013,0,0,-0.013,39.242,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z"></path></g><g transform="matrix(.013,0,0,-0.013,50.505,0)"><path d="M412 140C382 77 369 73 315 73H129L270 222C362 320 402 379 402 466C402 571 322 635 234 635C177 635 130 609 99 576L42 495L64 475C90 514 133 568 201 568C274 568 318 519 318 435C318 349 255 267 193 193C144 135 87 78 32 23V0H405C417 45 427 89 440 131L412 140Z"></path></g><g transform="matrix(.013,0,0,-0.013,56.745,0)"><path d="M113 -12C146 -12 170 11 170 46C170 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391Z"></path></g><g transform="matrix(.013,0,0,-0.013,12.831,0)"><path d="M162 -163V703H101V-163H162Z"></path></g><g transform="matrix(.013,0,0,-0.013,19.882,0)"><path d="M512 -3V55L134 254V256L512 456V514L75 281V230L512 -3Z"></path></g><g transform="matrix(.013,0,0,-0.013,31.145,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z"></path></g></svg> for propagating waves with <span class="nowrap"><svg height="12.5794pt" id="M38" style="vertical-align:-3.29107pt" version="1.1" viewbox="-0.0498162 -9.28833 37.9284 12.5794" width="37.9284pt" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M480 416C480 431 465 448 438 448C388 448 312 383 252 330C217 299 188 273 155 237H153L257 680C262 700 263 712 253 712C240 712 183 684 97 674L92 648L126 647C166 646 172 645 163 606L23 -6L29 -12C51 -5 77 2 107 8C115 62 130 128 142 180C153 193 179 220 204 241C231 170 259 106 288 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336 -12 358 -12C381 -12 423 2 477 80L460 100C434 74 408 54 398 54C385 54 374 65 351 107C326 154 282 241 263 299C296 332 351 377 403 377C424 377 436 372 445 368C449 366 456 368 462 375C472 386 480 402 480 416Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,6.474,3.132)"><path d="M545 403C545 425 527 451 498 451C448 451 400 404 312 286L290 341C262 412 246 451 219 451C182 451 138 404 92 345L112 323C152 368 169 378 181 378C192 378 201 359 216 321L257 214C184 115 142 69 113 69C102 69 93 73 88 79S78 89 68 89C47 89 24 61 24 40C24 8 49 -12 75 -12C125 -12 175 31 271 175L312 64C330 15 357 -12 382 -12C421 -12 475 35 515 98L496 121C466 88 439 62 420 62C402 62 384 92 363 147L325 247C349 280 374 309 397 333C422 361 446 381 462 381C471 381 481 374 488 366C493 360 499 357 505 357C521 357 545 380 545 403Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,11.652,3.132)"><path d="M245 635C92 635 37 457 37 312C37 149 91 -12 244 -12C395 -12 449 166 449 312C449 469 395 635 245 635ZM243 598C332 598 358 454 358 312C358 173 334 26 245 26C158 26 128 174 128 313S152 598 243 598Z"></path></g><g transform="matrix(.013,0,0,-0.013,20.25,0)"><path d="M512 230V281L75 514V456L453 256V254L75 55V-3L512 230Z"></path></g><g transform="matrix(.013,0,0,-0.013,31.512,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z"></path></g></svg>,</span> it can be amplified. (b) Mode effective index of DMD waveguide.</p>

International Journal of Optics

Thin Metal Superlens Imaging in Nanolithography

Figure 2