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International Journal of Photoenergy
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International Journal of Photoenergy
/
2011
/
Article
/
Tab 1
/
Research Article
Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide
Table 1
Resistivity, thickness and refractive index of ITO thin films deposited using various RF power for 40 min deposition time.
RF power
(W)
Thickness
(
μ
m)
Refractive
index
Resistivity
(Ω·cm)
50
0.50
1.48
100
0.59
1.49
150
0.63
1.5
200
1.09
1.506
250
1.17
1.505
300
1.29
1.509