Optimization of Recombination Layer in the Tunnel Junction of Amorphous Silicon Thin-Film Tandem Solar Cells

Table 1

The deposition conditions of intrinsic layer of the tandem solar cell.

Parameter	Value
Power (W)	10
Pressure (Pa)	90
E/S distance (mm)	30
Substrate temperature (°C)	200
SiH4 flow rate (sccm)	40
H2 flow rate (sccm)	160
i2/i1 thickness ratio	2–10