17.6% Conversion Efficiency Multicrystalline Silicon Solar Cells Using the Reactive Ion Etching with the Damage Removal Etching

Figure 4

SEM images of RIE textured surface with various DRE times (30000x): (a) No DRE, (b) DRE 20 sec, (c) DRE 40 sec, and (d) DRE 60 sec.

(a)

(b)

(c)

(d)