17.6% Conversion Efficiency Multicrystalline Silicon Solar Cells Using the Reactive Ion Etching with the Damage Removal Etching

Table 1

The average electrical performance of homogeneous emitter mc-Si solar cell with acidic and RIE texturing.

	𝑉oc; (V)	𝐼sc; (A)	FF; (%)	Eff.; (%)
Acid texturing	0.626	8.241	77.97	16.54
RIE texturing	0.619	8.284	76.88	16.20
Difference	−0.007	+0.043	−1.09	−0.34