17.6% Conversion Efficiency Multicrystalline Silicon Solar Cells Using the Reactive Ion Etching with the Damage Removal Etching

Table 2

The average electrical performance of selective emitter mc-Si solar cell with acidic and RIE texturing.

	𝑉oc; (V)	𝐼sc; (A)	FF; (%)	Eff.; (%)
Acid texturing	0.633	8.517	78.1	17.3
RIE texturing (DRE 20 sec)	0.632	8.685	77.9	17.6