637943.fig.002
Figure 2: Raman spectra of In2S3 films deposited at 220°C and 312°C (220, 312, resp.): black lines. Raman spectra of the same films after one hour annealing at 500°C in the furnace (220 ann, 312 ann): red lines. Raman spectrum of In2S3 films deposited at 312°C after 1 min. rapid thermal annealing at 500°C (312 RTA): blue line.