(a)
(b)
Figure 6:
Deposition temperature dependence of height distribution parameters: (a) full widths at half maximum (FWHM) and (b) peak maximum (
) of In
2
S
3
films evaluated on different scales (2 × 2
μ
m
2
, 5 × 5
μ
m
2
, and 10 × 10
μ
m
2
).
