637943.fig.006a
(a)
637943.fig.006b
(b)
Figure 6: Deposition temperature dependence of height distribution parameters: (a) full widths at half maximum (FWHM) and (b) peak maximum ( ) of In2S3 films evaluated on different scales (2 × 2 μm2, 5 × 5 μm2, and 10 × 10 μm2).