643895.fig.001a
(a)
643895.fig.001b
(b)
643895.fig.001c
(c)
643895.fig.001d
(d)
Figure 1: Cross-section SEM images of the films. The films were prepared for 60 (a), 180 (b), and 360 min. (c), respectively. (d) Film thickness versus deposition time. The arrows indicate the interface between the films and Si substrate.