643895.fig.004a
(a)
643895.fig.004b
(b)
643895.fig.004c
(c)
643895.fig.004d
(d)
Figure 4: FT-IR results. The spectra were obtained from the films prepared for (a) 30, (b) 60, and (c) 360 min. (d) Si–H bonding fractions versus film thickness.