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International Journal of Photoenergy
Volume 2012 (2012), Article ID 643895, 8 pages
doi:10.1155/2012/643895
Research Article
Nanostructural, Chemical, and Mechanical Features of nc-Si:H Films Prepared by PECVD
Department of Materials Science and Engineering, Inha University, Incheon, Republic of Korea
Received 29 August 2011; Revised 26 November 2011; Accepted 5 January 2012
Academic Editor: Junsin Yi
Copyright © 2012 Jong-Ick Son et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Linked References
- H. Shirai, T. Arai, and T. Nakamura, “Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry,” Applied Surface Science, vol. 113-114, pp. 111–115, 1997. View at Scopus
- J. I. Pankove, M. A. Lampert, and M. L. Tarng, “Hydrogenation and dehydrogenation of amorphous and crystalline silicon,” Applied Physics Letters, vol. 32, no. 7, pp. 439–441, 1978. View at Publisher · View at Google Scholar · View at Scopus
- N. Fukata, C. Li, H. Morihiro, K. Murakami, M. Mitome, and Y. Bando, “Hydrogenation effect on enhancement of photoluminescence of Er and Si nanocrystallites in Er-doped SiO2 synthesized by laser ablation,” Applied Physics A, vol. 84, no. 4, pp. 395–401, 2006. View at Publisher · View at Google Scholar · View at Scopus
- K. Ensslen and S. Vepřek, Journal of Electroceramics, vol. 7, p. 139, 1986.
- J. I. Son, H. H. Kim, and N. H. Cho, “Effect of substrate alternating current bias on the nanostructural features of nc–Si : H Films,” Journal of the Korean Physical Society, vol. 58, p. 1384, 2011.
- A. V. Shah, H. Schade, M. Vanecek et al., “Thin-film silicon solar cell technology,” Progress in Photovoltaics: Research and Applications, vol. 12, no. 2-3, pp. 113–142, 2004. View at Scopus
- B. Yan, G. Yue, J. Yang, A. Banerjee, and S. Guha, “Hydrogenated microcrystalline silicon single-junction and multi-junction solar cells,” Materials Research Society Symposium Proceedings, vol. 762, pp. 309–320, 2003. View at Scopus
- J. Yang, B. Yan, G. Yue, and S. Guha, in Proceedings of the 31st IEEE Photovoltaic Specialists Conference (PVSC '05), p. 1359, Orlando, Fla, USA, 2005.
- J. I. Langford and A. J. C. Wilson, “Scherrer after sixty years: a survey and some new results in the determination of crystallite size,” Journal of Applied Crystallography, vol. 11, pp. 102–113, 1978.
- D. Han, J. D. Lorentzen, J. Weinberg-Wolf, L. E. McNeil, and Q. Wang, “Raman study of thin films of amorphous-to-microcrystalline silicon prepared by hot-wire chemical vapor deposition,” Journal of Applied Physics, vol. 94, no. 5, pp. 2930–2936, 2003. View at Publisher · View at Google Scholar · View at Scopus
- H. Richter, Z. P. Wang, and L. Ley, “The one phonon Raman spectrum in microcrystalline silicon,” Solid State Communications, vol. 39, no. 5, pp. 625–629, 1981.
- Y. He, C. Yin, G. Cheng, L. Wang, X. Liu, and G. Y. Hu, “The structure and properties of nanosize crystalline silicon films,” Journal of Applied Physics, vol. 75, no. 2, pp. 797–803, 1994. View at Publisher · View at Google Scholar · View at Scopus
- H. Xia, Y. L. He, L. C. Wang et al., “Phonon mode study of Si nanocrystals using micro-Raman spectroscopy,” Journal of Applied Physics, vol. 78, no. 11, pp. 6705–6708, 1995. View at Publisher · View at Google Scholar · View at Scopus
- D. Beeman, R. Tsu, and M. F. Thorpe, “Structural information from the Raman spectrum of amorphous silicon,” Physical Review B, vol. 32, no. 2, pp. 874–878, 1985. View at Publisher · View at Google Scholar · View at Scopus
- P. Jakob and Y. J. Chabal, “Chemical etching of vicinal Si(111): dependence of the surface structure and the hydrogen termination on the pH of the etching solutions,” The Journal of Chemical Physics, vol. 95, no. 4, pp. 2897–2909, 1991. View at Scopus
- M. H. Brodsky, M. Cardona, and J. J. Cuomo, “Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering,” Physical Review B, vol. 16, no. 8, pp. 3556–3571, 1977. View at Publisher · View at Google Scholar · View at Scopus
- W. C. Oliver and G. M. Pharr, “Improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” Journal of Materials Research, vol. 7, no. 6, pp. 1564–1580, 1992. View at Scopus
- L. F. Cui, R. Ruffo, C. K. Chan, H. Peng, and Y. Cui, “Crystalline-amorphous core-shell silicon nanowires for high capacity and high current battery electrodes,” Nano Letters, vol. 9, no. 1, pp. 491–495, 2009. View at Publisher · View at Google Scholar · View at PubMed
- M. Schade, N. Geyer, B. Fuhrmann, F. Heyroth, and H. S. Leipner, “High-resolution analytical electron microscopy of catalytically etched silicon nanowires,” Applied Physics A, vol. 95, no. 2, pp. 325–327, 2009. View at Publisher · View at Google Scholar · View at Scopus
- J. Zhou, W. Zhang, L. Wang et al., “Fabrication, microstructure and optical properties of polycrystalline Er3+:Y3Al5O12 ceramics,” Ceramics International, vol. 37, no. 1, pp. 119–125, 2011. View at Publisher · View at Google Scholar · View at Scopus
- S. S. Zhao, H. Du, W. G. Hua, J. Gong, J. B. Li, and C. Sun, “The depth distribution of residual stresses in (Ti,Al)N films: measurement and analysis,” Journal of Materials Research, vol. 22, no. 10, pp. 2659–2662, 2007. View at Publisher · View at Google Scholar
- H. Hao, J. Xing, W. Li, X. Zeng, G. Kong, and X. Liao, “The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films,” Optoelectronics and Advanced Materials, Rapid Communications, vol. 5, no. 2, pp. 112–115, 2011.
- X. L. Jiang, Y. L. He, and H. L. Zhu, “The effect of passivation of boron dopants by hydrogen in nano-crystalline and micro-crystalline silicon films,” Journal of Physics, vol. 6, no. 3, pp. 713–718, 1994. View at Publisher · View at Google Scholar · View at Scopus