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International Journal of Photoenergy
Volume 2012 (2012), Article ID 643895, 8 pages
http://dx.doi.org/10.1155/2012/643895
Research Article

Nanostructural, Chemical, and Mechanical Features of nc-Si:H Films Prepared by PECVD

Department of Materials Science and Engineering, Inha University, Incheon, Republic of Korea

Received 29 August 2011; Revised 26 November 2011; Accepted 5 January 2012

Academic Editor: Junsin Yi

Copyright © 2012 Jong-Ick Son et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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