Table 2:
Variation in the chemical and physical features of the nc-Si:H thin films with deposition time.
Deposition time (min)
Film thickness (nm)
(nm)
(nm)
Crystal volume fraction (%)
Monohydride volume fraction (%)
Elastic modulus (Gpa)
10
85
—
—
—
2.7
157
30
260
5.8
6.9
7.5
11.8
135
60
490
6.2
7.3
8.0
28.4
141
180
1780
7.4
7.9
17.7
50.8
144
360
4150
8.1
8.5
45.0
74.5
147
*
: crystal size measured by XRD.
**
: crystal size measured by Raman Spectroscopy.