Table 2: Variation in the chemical and physical features of the nc-Si:H thin films with deposition time.

Deposition time (min)Film thickness (nm) (nm) (nm)Crystal volume fraction (%)Monohydride volume fraction (%)Elastic modulus (Gpa)

10852.7157
302605.86.97.511.8135
604906.27.38.028.4141
18017807.47.917.750.8144
36041508.18.545.074.5147

* : crystal size measured by XRD.
** : crystal size measured by Raman Spectroscopy.