Table 2:
results of different etching depths after annealing.
[ohm/sq]
Max
Average
Min
Uniformity (%)
ED0
66.58
64.7
63.2
2.61%
ED3
67.31
65.3
63.6
2.84%
ED6
66.78
64.9
63.4
2.60%
ED9
66.77
65.1
63.23
2.72%