Table 5: The devices characteristic of different etching depths.

Item (V) (A) (mohm) (ohm)FF (%) (%) (A)

ED00.634 8.862.3963.4779.7218.740.49
ED30.636 8.882.3661.2179.7318.840.52
ED60.640 8.932.2359.8179.7519.070.55
ED90.638 8.912.3760.6579.7418.970.59