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International Journal of Photoenergy
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International Journal of Photoenergy
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2012
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Article
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Fig 4
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Research Article
Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor
Figure 4
Simulation analysis of SiH
4
mass fraction between nozzle (a) type A and (b) B.
(a)
(b)