In Situ and Ex Situ Studies of Molybdenum Thin Films Deposited by rf and dc Magnetron Sputtering as a Back Contact for CIGS Solar Cells

Figure 7

Evolution of surface roughness (solid line) and bulk layer thicknesses (dashed line) obtained by RTSE for Mo deposition using dc and rf sputtering at 10 mTorr. The bulk layer becomes fully opaque at large thickness values and, as a result, its thickness cannot be determined.