Research Article
TiO2:(Fe, S) Thin Films Prepared from Complex Precursors by CVD, Physical Chemical Properties, and Photocatalysis
Table 4
Composition (atom percentage, %) of TiO2 films according to XPS analyses (The composition is shown for XPS spectra taken at 0°).
| | Attribution | | Sample 1 | Sample 30 | Sample 31 | Sample 65 | Sample 66 | Sample 75 | Sample 77 | Sample 85 |
| | Ti, 2p | Ti | 12.9 | 20.9 | 20.7 | 21.7 | 22.0 | 18.34 | 16.93 | 11.2 | | Oxygen, 1s | O | 40.7 | 63.2 | 59.0 | 61.24 | 59.4 | 52.72 | 51.84 | 43.65 | | Carbon total | C | 39.0 | 14.8 | 20.3 | 17.1 | 22.0 | 23.21 | 27.1 | 33.0 | | Fluorine, 1s | F | — | — | — | — | — | 5.2 | 2.34 | 8.04 | | Sodium, 1s | Na | — | — | — | — | — | — | — | 3.0 | | Iron, 2p | Fe | — | — | — | — | — | — | 1.02 | 0.47 | | Sulphur, 2p | S | — | — | — | — | — | 0.53 | 0.77 | 0.57 |
| | Stoichiometry | | TiO2.4 | TiO2.48 | TiO2.47 | TiO2.25 | TiO2.25 | TiO2.22 | TiO2.3 | TiO2.2 |
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