Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells

<table>The refractive index and stoichiometry of <svg height="15.65" id="M20" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 32.537498 15.65" width="32.537498" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg> varying with the ratio of SiH<sub>4</sub> : NH<sub>3</sub>.</table>

International Journal of Photoenergy

Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells

Figure 3