Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells

<table>The conversion efficiency and open-circuit voltage of the black silicon solar cell varying with the NH<sub>3</sub>/SiH<sub>4</sub> gas flow ratio. </table>

International Journal of Photoenergy

fig5

Figure 5

Figure 5: Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells 