Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells

Figure 8

The microstructure of SiN film varying with deposition time, Top view: (a) 300 s, (b) 500 s, and (c) 700 s, Side view: (d) 300 s, (e) 500 s, and (f) 700 s.

(a)

(b)

(c)

(d)

(e)

(f)