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International Journal of Photoenergy
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International Journal of Photoenergy
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2012
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Article
/
Tab 1
/
Research Article
Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells
Table 1
The influence of deposition time on the properties of black silicon solar cells.
ā
(V)
(A)
(m
)
(%)
300
0.605
8.01
3.19
15.23
500
0.611
8.25
3.21
15.91
700
0.613
8.22
4.62
15.66