Effect of Hydrogen Content in Intrinsic a-Si:H on Performances of Heterojunction Solar Cells

Table 2

Deposition conditions of low-H and high-H.

Parameter	Value
	Low-H	High-H
Power density (mW/cm^2)	25	25
Pressure (Pa)	90	90
Electrode-to-substrate distance (mm)	30	30
Substrate temperature (°C)	180	180
SiH4 flow rate (sccm)	40	40
H2 flow rate (sccm)	0	320
Hydrogen content (%)	6	18