Research Article
Effect of Hydrogen Content in Intrinsic a-Si:H on Performances of Heterojunction Solar Cells
Table 2
Deposition conditions of low-H and high-H.
| Parameter | Value | Low-H | High-H |
| Power density (mW/cm2) | 25 | 25 | Pressure (Pa) | 90 | 90 | Electrode-to-substrate distance (mm) | 30 | 30 | Substrate temperature (°C) | 180 | 180 | SiH4 flow rate (sccm) | 40 | 40 | H2 flow rate (sccm) | 0 | 320 | Hydrogen content (%) | 6 | 18 |
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