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International Journal of Photoenergy
Volume 2013 (2013), Article ID 128410, 9 pages
Research Article

Simulation of Proton Beam Effects in Thin Insulating Films

1Faculty of Electrical Engineering, University of Belgrade, 11060 Belgrade, Serbia
2State University of Novi Pazar, 36300 Novi Pazar, Serbia
3Institute of Nuclear Sciences “Vinca”, 11000 Belgrade, Serbia

Received 15 April 2013; Accepted 28 May 2013

Academic Editor: Predrag Osmokrovic

Copyright © 2013 Ljubinko Timotijevic et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Effects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ultrathin layers of these materials has been modeled by Monte Carlo simulations of particle transport. Parameters that have been varied in simulations include proton energy and insulating layer thickness. Materials are compared according to both ionizing and nonionizing effects produced by the passage of protons.