128410.fig.003a
(a)
128410.fig.003b
(b)
128410.fig.003c
(c)
128410.fig.003d
(d)
128410.fig.003e
(e)
128410.fig.003f
(f)
Figure 3: Plots of vacancy concentrations and mass energy losses (LET and NIEL divided by material density) along the depth of an alumina (Al2O3) insulating film. Results were obtained from simulations of 104 proton histories, which included subcascades of recoiling atoms.