Simulation of Proton Beam Effects in Thin Insulating Films

Figure 4

Plots of (a) vacancy concentrations and (b) mass energy losses (LET and NIEL divided by material density) along the depth of a 0.4 μm thick lexan (polycarbonate) film. (c) Tracks of protons and recoiling atoms. Results were obtained from simulations of 10⁴ proton histories, for a 10 keV incident proton beam.

(a)

(b)

(c)