Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution

Table 2

The mineralization efficiency of TMAH by UV/O₃ at different chloride concentrations. (Experimental conditions are as shown in Figure 4(d).)

Cl^− (mg/L)	𝜂TOC,TMAH (%)
0	87.56
100	80.08
200	78.58
300	76.05
500	74.73