Effects of Ion Beam Irradiation on Nanoscale InO_𝑥 Cooper-Pair Insulators

Figure 4

Results for 10³ iron ions with 0.1 MeV energy. Distribution of the concentration of the recoils per unit ion fluence and ionization energy losses per unit depth for various thicknesses of the InO_𝑥 film: 5 nm (a and b), 10 nm (c and d), and 15 nm (e and f).

(a)

(b)

(c)

(d)

(e)

(f)