Effects of Ion Beam Irradiation on Nanoscale InO_𝑥 Cooper-Pair Insulators

Figure 5

Distribution of the concentration of the recoils per unit ion fluence and ionization energy losses per unit depth in a 15 nm thick InO_𝑥 film for a 0.1 MeV incident beam of 10³ phosphorus ions (a and b), boron ions (c and d), and arsenic ions (e and f).

(a)

(b)

(c)

(d)

(e)

(f)