The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells

Table 1

Sputtering parameters for Mo thin films, factors, and levels.

Substrate		Soda lime glass (25×25×1 mm)
Target		Molybdenum (99.95% purity)
Gas		Argon (99.95% purity)
Base pressure		4×10^−6 Torr
Substrate-to-target distance		85 mm
Substrate rotation speed		10 rpm
Level	Sputtering parameter	1	2	3
A	Working pressure (mTorr)	3	8	13
B	dc power (W)	200	300	400
C	Substrate temperature (°C)	Room	100	200