Research Article
The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells
Table 3
ANOVA results for the electrical resistivity of the Mo films.
| Factor | Degrees of freedom | Sum of the squares | Variance | Contribution (%) |
| A | 2 | 1093.37 | 546.684 | 94.77 | B | 2 | 28.52 | 14.259 | 2.47 | C | 2 | 12.79 | 6.393 | 1.11 | Residual error | 2 | 18.94 | 9.470 | 1.65 |
| Total | 8 | 1153.61 | ā | 100 |
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