Research Article
The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells
Table 4
Summary of the X-ray diffraction measurements and the results for electrical resistivity, reflection, and adhesion tests.
| No. | | Factors
| |
XRD | | Resistivity (Ω-cm) | Reflection (%) | Adhesion (fail/pass) | A | B | C | FWHM (110) (deg) | Grain size (nm) |
| 1 | 1 | 1 | 1 | 0.50 | 17.69 | | 55.40 | Fail | 2 | 1 | 2 | 2 | 0.51 | 17.34 | | 55.22 | Fail | 3 | 1 | 3 | 3 | 0.49 | 18.05 | | 58.87 | Fail | 4 | 2 | 1 | 2 | 1.01 | 8.76 | | 38.63 | Pass | 5 | 2 | 2 | 3 | 0.58 | 15.25 | | 40.11 | Pass | 6 | 2 | 3 | 1 | 0.83 | 10.66 | | 42.90 | Pass | 7 | 3 | 1 | 3 | 1.03 | 8.58 | | 32.47 | Pass | 8 | 3 | 2 | 1 | 1.25 | 7.07 | | 34.55 | Pass | 9 | 3 | 3 | 2 | 0.96 | 9.21 | | 42.97 | Pass |
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