Research Article

Isolation of III-V/Ge Multijunction Solar Cells by Wet Etching

Figure 2

Simplified microfabrication process of isolated multijunction solar cells.
583867.fig.002a
(a) III-V/Ge bare wafer
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(b) Isolation trenches etched in the III-V/Ge layers defining the solar cell mesa
583867.fig.002c
(c) Completed solar cells on mesas
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(d) Singulated solar cells