Preparation and Characterization of Cu₂ZnSnS₄ Thin Films and Solar Cells Fabricated from Quaternary Cu-Zn-Sn-S Target

Table 1

Composition ratios of the CZTS target, the sputtered films, and sulfurized films (atomic ratios).

	Cu/(Zn + Sn)	Zn/Sn	S/Metal	Cu/(Cu + Zn + Sn)	Zn/(Cu + Zn + Sn)	Sn/(Cu + Zn+ Sn)
The target	0.83	1.11	0.75	0.45	0.29	0.26
The sputtered films	0.92	0.87	0.75	0.48	0.24	0.28
The sulfurized films	0.92	0.83	0.97	0.48	0.24	0.28