Optical and Electrical Effects of p-type μc-SiOx:H in Thin-Film Silicon Solar Cells on Various Front Textures
Figure 3
(a) Oxygen/silicon ratio measured using RBS. (b) Conductivity σ and Raman intensity ratio I c of p-type μc-SiOx:H layer as a function of CO2/SiH4-ratio. The dashed line in (b) marks the required conductivity for a solar cell device with high FF. The dashed line in (a) is a guide to the eye.