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International Journal of Photoenergy
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International Journal of Photoenergy
/
2014
/
Article
/
Tab 1
/
Research Article
Optical and Electrical Effects of p-type
μ
c-SiO
x
:H in Thin-Film Silicon Solar Cells on Various Front Textures
Table 1
Overview of deposition parameters for the p-type
c-
:H layer deposition by PECVD.
Power density/W/cm²
Frequency/MHz
Pressure/mbar
Temperature/°C
H
2
dil.
(SiH
4
:H
2
)
0.5
13.56
13.3
220
4.2 : 2000
1.2–6.0
0–0.036